High purity Celazole® PBI is especially suited for semiconductor and flat panel display applications and parts

PBI is especially suited for parts used in oxide etching, sputtering, chemical vapor deposition (CVD), physical vapor deposition (PVD), and wafer/panel contact parts.

For in-chamber applications, high purity Celazole® U-60SD grade with ultra-low ionic content is recommended. This high purity grade contains nominally just 1 ppm of critical metallic ions and was specifically developed for the semiconductor industry.

Products

2x

Semiconductor parts made with Celazole® PBI last 2x longer

LONG SERVICE LIFE

High strength Celazole® PBI replaces easy to break quartz, ceramic and polyimide

INCREASE YIELDS

Celazole® PBI has replaced many polyimide pins, bushings, screws, insulators and other in-chamber parts by offering extended life cycles

APPLICATIONS

Oxide etch chamber seals

Celazole U-60SD replaced Quartz oxide etch chamber seals, extending service life of the seal

Etch chamber lifting pins

Celazole® PBI replaced Alumina lifting pins, extending the life cycle, while reducing wafer contamination, pin breakage and wafer scratching

Oxide etch chamber parts

Excellent replacement for polyimide pins, bushings, screws and insulators by extending life cycle, doubling strength, and reducing particle generation

Focus rings

Superior abrasion resistance and plasma resistance to CF₄, F, O₂ and Ar plasmas

Wafer clamps

Celazole® U-60SD is an ultra pure semiconductor grade polymer that can lower wafer contamination

Sputter chamber seals

Offers high heat resistance; 427°C (800°F) glass transition temperature.