PBI is especially suited for parts used in oxide etching, sputtering, chemical vapor deposition (CVD), physical vapor deposition (PVD), and wafer/panel contact parts.
For in-chamber applications, high purity Celazole® U-60SD grade with ultra-low ionic content is recommended. This high purity grade contains nominally just 1 ppm of critical metallic ions and was specifically developed for the semiconductor industry.
Celazole U-60SD replaced Quartz oxide etch chamber seals, extending service life of the seal
Celazole® PBI replaced Alumina lifting pins, extending the life cycle, while reducing wafer contamination, pin breakage and wafer scratching
Excellent replacement for polyimide pins, bushings, screws and insulators by extending life cycle, doubling strength, and reducing particle generation
Superior abrasion resistance and plasma resistance to CF4, F, O2 and Ar plasmas
Celazole® U-60SD is an ultra pure semiconductor grade polymer that can lower wafer contamination
Offers high heat resistance; 427°C (800°F) glass transition temperature.
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